直线电机高速高精运动分段式三元复合控制
Segmented Ternary Composite Control Method for High Speed and High Precision Motion of Linear Motor
汪惟桢 1张驰 2李荣 2桑娜 2潘春荣 3郑林卫4
作者信息
- 1. 江西理工大学机电工程学院,赣州 341000;中国科学院宁波材料技术与工程研究所浙江省机器人与智能制造装备技术重点实验室,宁波 315201
- 2. 中国科学院宁波材料技术与工程研究所浙江省机器人与智能制造装备技术重点实验室,宁波 315201
- 3. 江西理工大学机电工程学院,赣州 341000
- 4. 宁波尚进自动化科技有限公司,宁波 315100
- 折叠
摘要
针对半导体键合机XY运动平台的直线电机在高速启停运动时残余振动较大的问题,提出了一种分段式三元复合控制方法以提高直线电机的定位精度.首先,基于正弦扫频的方法建立了直线电机被控对象的高阶精确模型;其次,在直线电机的高速运动阶段采用三阶前馈控制与PID反馈控制结合的复合控制方法,实现了高动态响应;分析了高速运动状态下扰动观测器对动态性能的影响,在定位阶段引入高阶扰动观测器以抑制残余振动.实验结果表明,与传统的"前馈+反馈"复合控制方法相比,分段式三元复合控制方法在不影响直线电机动态跟踪性能的情况下,使其定位误差调整至±0.5 μm所需的时间降低了89%以上,显著提高了其定位精度.
Abstract
A segmented ternary composite control method is proposed in this paper to improve the positio-ning accuracy of linear motor on semiconductor bonding machine XY motion stage with high residual vibra-tion during high-speed start-stop motion.Firstly,a high-order accurate model of the controlled object of the linear motor is established based on a sinusoidal sweep method.Secondly,a composite control method com-bining third-order feedforward control and PID feedback control is used in the high-speed motion phase of the linear motor to achieve high dynamic response;the influence of the disturbance observer on the dynamic per-formance in the high-speed motion state is analyzed,and a high-order disturbance observer is introduced in the settling period to suppress residual vibration.The experimental results show that,compared with the con-vertional"feedforward +feedback"composite control method,the segmented ternary composite control meth-od reduces the time required to adjust the positioning error to±0.5 μm by more than 89%without affecting the dynamic tracking performance of the linear motor,significantly improving its positioning accuracy.
关键词
永磁同步直线电机/高速高精运动/残余振动抑制/高阶扰动观测器/分段式三元复合控制Key words
permanent magnet synchronous linear motor/high speed and high precision motion/residual vibration suppression/higher-order disturbance observer/segmented ternary composite control引用本文复制引用
基金项目
浙江省自然科学基金项目(LD21E070002)
宁波市重点研发计划暨"揭榜挂帅"项目(2023Z025)
宁波市自然科学基金项目(2022J315)
深圳市科技创新技术攻关重点项目(JSGG20200807171602028)
出版年
2024
NETL
NSTL
维普
万方数据