Linear Disturbance Rejection Sliding Model Control of Voice Coil Motor-Driven Micro-Positioning Stage
Aiming at the problems of low control speed and accuracy and weak anti-interference ability of the flexible micro-positioning stage driven by voice coil motor,this paper designs a composite controller combining sliding mode control and linear active disturbance rejection control to improve the control per-formance of the platform system.Firstly,a micro-positioning platform and experimental system of voice coil motor driven composite dual-parallel four-bar flexible mechanism were built,and the system identification was carried out;Secondly,the linear active disturbance rejection controller is designed,and the linear expan-sion state observer is used to estimate the internal and external disturbances of the system and compensate for the disturbance online,aiming at the limitations of the performance optimization of the linear active dis-turbance rejection controller,the sliding mode controller is proposed to solve the phase lag problem to fur-ther improve the trajectory tracking accuracy;Finally,the experimental platform built was used to verify the control method.Compared with the classical PID control and the single linear active disturbance rejection control,the maximum error of tracking the sine wave signal is reduced by 52.98%and 21.26%,respectively,which meets the control requirements of high precision and high speed of the micro-positioning stage.
active disturbance rejection controlsliding mode controlmicro-positioning stagevoice coil motorflexure mechanism
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