A flexible diaphragm with precision guidance is proposed for the requirements of small stroke and high accuracy of the precision guidance mechanism in micro-vibration simulators.First,the axial and radial flexibility of the flexible diaphragm is modeled based on the flexibility matrix method;Second,the axial and radial flexibility of the flexible diaphragm is parametrically analyzed based on the structural pa-rameters of the flexible diaphragm;Then,an optimized design model was established with the objectives of high axial flexibility,high axial/radial flexibility ratio and low stress.The optimization results show that the optimization rate of axial flexibility is 233%,the optimization rate of axial/radial flexibility ratio is 172%,and the optimization rate of maximum stress is 32%.The performance of the flexible diaphragm is greatly improved in each target after optimization;Finally,finite element analysis and experiment are used for veri-fication.The relative errors of the finite element analysis and experimental results relative to the theoretical analysis are 6.7% and 7.8%,respectively.The theoretical analysis and optimization method provide a sim-ple and effective design idea for the flexible diaphragm in this paper.
precision guidanceflexible diaphragmsflexibility matrixfinite element analysis