Numerical Simulation and Experimental Study on Static Characteristics of Aerostatic Bearing for Polishing Machine
The quality of silicon grinding is closely related to the performance of the feed system of silicon grinding machine.In order to improve the accuracy and stability of the feed system of silicon chip grinding machine,a technical scheme of closed-loop control feed is put forward,which uses host computer,motion control card,servo driver and position sensor.The coupling relationship between the servo system and the mechanical system is studied,the dynamics model is established,and the three closed-loop control system based on PID control is built.Simulink module in MATLAB is used to simulate and analyze the feed sys-tem.The simulation results show that,The speed fluctuation of the grinding machine feed system is less than 1%to meet the requirements of silicon chip grinding for feed accuracy.
silicon wafer grinderservo feed systemthree-loop controldynamical model
NETL
NSTL
万方数据
维普
