Research on the Influence of PWM Frequency on the Dynamic Performance of Ultra Precision Machine Tool Spindles
In order to analyze the influence of the PWM frequency of the multi-axis linkage ultra-precision machine tool servo drive on the dynamic performance of the ultra-precision machine tool,This research is based on the aerostatic spindle of a domestic ultra-precision machine tool to carry out Simulink modeling and simulation of its control system,and carry out position control experiments.Through the dynamic char-acteristic equation of the spindle motor,the dynamic response of the ultra-precision machine tool spindle un-der the PWM controller is modeled,and the response waveforms of the current,torque and speed of the spindle motor under different PWM frequencies are simulated.By analyzing the simulation data,the control law between the plant and the PWM frequency is obtained.On this basis,the repetitive positioning accuracy of the spindle is used as the dynamic performance parameter to build an ultra-precision machine tool spindle dynamic performance test platform,and the correlation degree is quantitatively evaluated by analyzing the linear correlation between the experimental data and the simulation results of the repetitive positioning accu-racy.Finally,it is obtained that the dynamic performance of the aerostatic spindle is significantly enhanced in the PWM frequency range of 20 to 60 kHz,while the enhancement trend in the frequency range of 60 to 100 kHz is slowed down,and the optimal PWM frequency parameter of the spindle dynamic performance is 60 kHz.It provides a reference for the parameter selection of the ultra-precision machine tool control system in the design and selection stage.