Wafer Defocusing Image Restoration Based on Defocusing Fuzzy Parameter Estimation
The defocusing fuzzy parameters of the point diffusion function obtained from high resolution wafer defocusing images are difficult to calculate and have low recovery efficiency.Therefore,a method of defocusing image restoration based on spot image is proposed.Firstly,the gray-scale projection of the spot image is carried out to obtain the line diffusion function curve.Then the line diffusion function curve is fit-ted and corrected to obtain the defocusing fuzzy parameters,so as to determine the point diffusion function.Finally,the second Wiener filter algorithm is used to restore the wafer defocusing image.The experimental results show that The second Wiener filter method proposed in this paper to estimate defocusing fuzzy pa-rameters for wafer defocusing images can significantly improve the peak signal-to-noise ratio(PSNR)of wafer defocusing images by at least 0.74 dB,reduce the blurring degree of wafer defocusing images,high-light the details of images,and reduce the calculation amount,thus improving the recovery efficiency.
wafer defocusing imagedefocusing fuzzy parameterpoint spread functionsecondary wiener filtering
万方数据
维普
