Design and Performance Testing of Voice Coil Motor Direct-Driven Aerostatic Lifting Platform
In the precision processing and precision measurement of semiconductors,in view of some optical path restrictions and fixed processing equipment,thepaper proposes a voice coil motor direct-driven aerostatic lifting platform to carry the workpiece for precise positioning. The driving element of the platform uses two high-precision,high-frequency,frictionless voice coil motors,the balance element uses a low-friction air-float-ing cylinder to balance the gravity of the moving parts,the guide element uses a porous aerostatic guideway for guidance,and the feedback element uses a high-precision grating ruler as a real-time feedback device. This paper conducts a gas theory analysis of theaerostatic guideway,uses Ansys software to simulate the bearing capacity and stiffness of the guideway,and verifies the simulation analysis through experiments. Considering the mechanical coupling effect when driving the two voice coil motors,a master parallel cross-coupling con-trol algorithm is used to precisely control the lifting platform. Finally,the performance test was conducted on the positioning accuracy,pitch error,yaw error,and straightness of the lifting platform,which proved that the lifting platform has the capability of precision processing and precision measurement.
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