Compound Control of Permanent Magnet Synchronous Linear Motor and Intelligent Setting of Feedforward Parameters
Linear motors are widely used in various semiconductor packaging. In order to improve the accu-racy of processed products,linear motors must have the characteristics of high positioning accuracy,high speed,high acceleration,and smooth motion. A composite control method of "three loop PID+three feed-forward control" is proposed by combining feedforward and feedback control through the study of feedfor-ward theory. To ensure the smooth motion of the linear motor without sudden acceleration and speed chan-ges,a fourth-order S-motion planning is used as the motion planning of the linear motor. To improve the ef-ficiency and accuracy of parameter tuning,an adaptive genetic algorithm is used to tune the three feedfor-ward coefficients. This article proposes three fitness design schemes,namely the directed optimization sys-tem dynamic segment,static segment,and the comprehensive consideration of system dynamic and static segments. After experimental verification,compared with pure PID control,using optimized dynamic feed-forward parameters can reduce the maximum dynamic error by 90.0％,and using optimized static feedfor-ward parameters can reduce the maximum static error by 95.6％. The comprehensive optimization of the feedforward parameters in the dynamic and static sections of the system can reduce the maximum dynamic error by 84.1％ and the maximum static error by 81.7％.
permanent magnet synchronous linear motorfeedforward controladaptive genetic algorithmparameter tuning
万方数据
维普
