Design of axial self-inductive displacement sensor based on LC parallel resonance
An axial self-inductive displacement sensor based on LC parallel resonance was proposed in order to meet the development demands for higher precision in magnetic bearings.The sensitivity of the sensor was improved by increasing the rate of change of equivalent inductance in the resonance circuit.The working principle of the sensor was analyzed.The relationship between the design parameters of the sensor and its sensitivity was analyzed through finite element simulation.Then a measurement circuit for the sensor was designed,and the influence of LC parallel resonance on the sensitivity of the sensor was analyzed combined with finite element simulation and numerical simulation.An experimental setup was constructed to test the static performance of the sensor.Results show that the proposed sensor exhibits higher sensitivity and lower linearity compared with traditional displacement sensors.
NETL
NSTL
万方数据
维普
