Research Progress in Synthesis and Application of Octafluorocyclopentene
Octafluorocyclopentene is an unsaturated perfluoroalkene with an ozone depletion potential(ODP)of 0,a global warming potential(GWP100)of 78.1,and an atmospheric lifespan of 1.1 years.As a new type of perfluorinated chemical,it is mainly used as an etching gas and cleaning agent for semiconductors,and is also considered a key fluorinated block for the preparation of organic photochromic materials.Due to its excellent environmental and operational performance,octafluorocyclopentene has received more and more attention in the field of integrated circuits,and therefore has huge potential market demand and good devel-opment prospects.This article introduces the research progress in the synthesis of octafluorocyclopentene and elaborates on its application in the field of electronic gas,in order to provide references for future research on octafluorocyclopentene.