首页|八氟环戊烯的合成与应用研究进展

八氟环戊烯的合成与应用研究进展

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八氟环戊烯是一种不饱和全氟烯烃,消耗臭氧潜能值(ODP)为 0,全球增温潜能值(GWP100)为 78.1,大气寿命为 1.1 年.作为一种新型的全氟化学品,主要用于半导体的刻蚀气与清洗剂,同时也被视为制备有机光致变色材料的关键含氟砌块.八氟环戊烯由于其优异的环境性能和工作性能,在集成电路等领域受到越来越多的关注,因此具有巨大的潜在市场需求和良好的发展前景.本文介绍八氟环戊烯的合成研究进展,并阐述了其在电子气领域的应用研究情况,以期为八氟环戊烯的未来研究提供参考.
Research Progress in Synthesis and Application of Octafluorocyclopentene
Octafluorocyclopentene is an unsaturated perfluoroalkene with an ozone depletion potential(ODP)of 0,a global warming potential(GWP100)of 78.1,and an atmospheric lifespan of 1.1 years.As a new type of perfluorinated chemical,it is mainly used as an etching gas and cleaning agent for semiconductors,and is also considered a key fluorinated block for the preparation of organic photochromic materials.Due to its excellent environmental and operational performance,octafluorocyclopentene has received more and more attention in the field of integrated circuits,and therefore has huge potential market demand and good devel-opment prospects.This article introduces the research progress in the synthesis of octafluorocyclopentene and elaborates on its application in the field of electronic gas,in order to provide references for future research on octafluorocyclopentene.

octafluorocyclopenteneperfluoroalkeneelectronic etching gascleaning agent

程浩、于万金、吴江平、林胜达、郭天佐、刘武灿

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浙江省化工研究院有限公司 含氟温室气体替代及控制处理国家重点实验室, 浙江 杭州 310023

八氟环戊烯 全氟烯烃 电子刻蚀气 清洗剂

2024

浙江化工
浙江省化工研究院有限公司

浙江化工

影响因子:0.131
ISSN:1006-4184
年,卷(期):2024.55(1)
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