膜法分离N2/SF6气体研究进展
Research Progress on Membrane Separation of N2/SF6 Gas
钟桂云 1高林娜 1吁苏云 1张艳中 1刘慧1
作者信息
- 1. 浙江省化工研究院有限公司,浙江 杭州 310023;中化蓝天集团有限公司,浙江 杭州 310051
- 折叠
摘要
六氟化硫(SF6)气体广泛应用于高压输配电系统、半导体和等离子蚀刻工艺等领域.与受到广泛关注的最常见温室气体二氧化碳相比,SF6 具有更高的全球增温潜能值和更长的大气寿命.传统的从N2/SF6 混合气体中捕获和回收SF6 方法(如蒸馏和液化)成本高昂,而膜法分离N2/SF6 混合气体得到SF6 具有较低能耗而被广泛研究.本文简要介绍膜法分离N2/SF6 混合气体技术的现状,以及此类分离工艺所面临的技术挑战.
Abstract
Sulfur hexafluoride(SF6)gas is widely used in high-voltage power transmission and distribu-tion systems,semiconductors and plasma etching processes.Compared to carbon dioxide,the most common greenhouse gas of widespread concern,SF6 has a higher global warming potential and a longer atmospheric lifetime.Traditional methods of capturing and recovering SF6 from N2/SF6 mixtures,such as distillation and liquefaction,are costly,while membrane separation of N2/SF6 mixtures to obtain SF6 has been widely studied due to its lower energy consumption.This article briefly introduces the current status of membrane separation of N2/SF6 mixtures and the technical challenges faced by such separation processes.
关键词
六氟化硫/氮气/混合气体/膜/分离Key words
sulfur hexafluoride/nitrogen/gas mixtures/membrane/separate引用本文复制引用
出版年
2024
NETL
NSTL
万方数据