Research Progress on Membrane Separation of N2/SF6 Gas
Sulfur hexafluoride(SF6)gas is widely used in high-voltage power transmission and distribu-tion systems,semiconductors and plasma etching processes.Compared to carbon dioxide,the most common greenhouse gas of widespread concern,SF6 has a higher global warming potential and a longer atmospheric lifetime.Traditional methods of capturing and recovering SF6 from N2/SF6 mixtures,such as distillation and liquefaction,are costly,while membrane separation of N2/SF6 mixtures to obtain SF6 has been widely studied due to its lower energy consumption.This article briefly introduces the current status of membrane separation of N2/SF6 mixtures and the technical challenges faced by such separation processes.
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