Numerical Simulation of Gas Flow in a Fixed Pitch Screw Vacuum Pump
The computational fluid dynamics(CFD)method was used to simulate the screw dry vacuum pump by numerical simulation and calculation,and the analysis method for the flow field of screw dry vacuum pump was established.The flow area in the pump chamber was modeled in 3D,and the rotating and fixed domains were meshed separately with SCORG and ANSYS-ICEM softwares.The transient simulation method was used to obtain the distribution of pressure field,speed field and temperature field in the pump,and the parameters such as pumping rate were calculated.Perform mesh agnostic analysis was carried out,and the comparison between analysis results and the theoretical data shows that the numerical simulation results are reliable and in line with expectations.
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