Combining with the manufacturing process of special alloy,the vacuum system of VIDP furnace from ALD was analyzed according to the configuration and vacuum pumping capacity,and several optimization application measures were proposed.The interval time of Roots pump is set to 120-180 s.The starting up threshold of two paralleling pump units of low vacuum system is set to 1 000 Pa and 2 500 Pa.Different maintenance period(3-12 months)for different components of Roots pump and the specific operation process of filling argon to break the vacuum during alloy melting are provided according to volatile characteristics of special alloy.At last,suggestions for improving the ability of vacuum system of the VIDP-300 furnace are proposed.
关键词
VIDP炉/真空系统优化/真空泵组/特种合金
Key words
VIDP furnace/vacuum system optimization/vacuum pump unit/special alloy
维普
万方数据