Plasma enhanced magnetron sputtering(PEMS)method was used to deposit TiCrSiCN and TiCrSiCON nanocomposite coatings using trimethylsilane(Si-C)and hexamethyldisiloxane(Si-C-O)precursors on H13 steel.The influences of oxygen on the microstructure,phases,surface energy,hardness,friction coefficient,wear resistance and high-temperature oxidation properties of the coatings were studied by SEM,AFM,XRD,EDS,etc.The results show that the oxygen-containing TiCrSiCON coating shows a rougher surface with a looser microstructure and typical columnar feature,compared with the oxygen-free TiCrSiCN coating.As a result,the surface energy of the oxygen-containing coating is higher than the oxygen-free coating.The addition of oxygen improves the hardness of the nanocomposite coating,thereby significantly enhancing the anti-wear property of the coating.As for the coefficient of friction,there is no obvious difference between TiCrSiCN and TiCrSiCON coatings.The Cr and O in the TiCrSiCON coating could form a dense oxide film which can improve its high-temperature oxidation property.
关键词
等离子增强磁控溅射/纳米复合涂层/显微组织/摩擦磨损性能/表面能/高温氧化性能
Key words
PEMS/nanocomposite coating/microstructure/friction and wear property/surface energy/high-temperature oxidation property
维普
万方数据