Design and Parameter Analysis of Bias Coil for Roll to Roll Evaporation Equipment
The high energy secondary electrons caused by electron beam will affect the quality of composite current collector during the roll to roll evaporation equipment working.The emissivity of secondary electron is proportional to the incident angle of the electron beam in a certain range,and the trajectory of electron beam can be biased in magnetic field.In this paper,one kind of electromagnetic bias coil was developed and designed based on simulation software and CAD modeling technology.Through parameter optimization,the matching magnetic field intensity and electron bias trajectory were obtained to reduce the incidence angle.At the same time,the influence of the electromagnetic coil parameters on bias were compared and analyzed.The results show that increasing the current,number of turns,coil size,coil number,and reducing the distance between the coil and the electron gun can all reduce the electron beam bias radius.By optimizing these parameters,the predetermined incidence angle can be obtained,and achieving low secondary electron emissivity,and providing a design basis for future equipment iteration upgrades.
roll to roll evaporationelectron beambias coilparameter optimization
万方数据
维普
