摘要
硬质TiAlN薄膜作为最有前途的TiN薄膜替代材料,具有比TiN薄膜更高的硬度、低摩擦因数、良好的高温稳定性和耐腐蚀性等优异性能,在石油、刀具、模具、电力、航空发动机等领域得到广泛应用.本文综述了TiAlN薄膜近年来国内外的应用及发展情况,着重阐述了TiAlN薄膜的制备方法,以及工艺参数对TiAlN薄膜性能的影响.同时对TiAlN硬质涂层的结构和性能进行了全面介绍,指出了TiAlN硬质薄膜性能优化的方法,并对TiAlN硬质薄膜的研究以及应用方向进行了展望.TiAlN硬质薄膜会随着科研人员的进一步深入研究以及应用的需求向复合化、多元化、纳米多层结构方向发展.
Abstract
As the most promising TiN film substitute material,TiAlN film has excellent properties such as high hardness,low friction coefficient,good high temperature stability and corrosion resistance.The TiAlN hard films are widely used in the fields petroleum,tools,molds,electric power and aircraft engines.The current application and research progress of domestic and foreign TiAlN films,the preparation methods,and the effects of process parameters on structure and properties of TiAlN films are summarized.The performance of TiAlN film is comprehensively introduced,the method to optimize the performance of TiAlN film is pointed out,and the research and application direction of TiAlN films are prospected.The TiAlN film will develop towards the multiple composite,multilayer structure,and nano multi-layer structure with the further research and the demand of application.
基金项目
重庆市教育委员科技项目(KJQN202101303)
重庆市自然科学基金面上项目(cstc2020jcyjmsxmX0069)
重庆市自然科学基金面上项目(2023NSCQ-MSX0711)
维普
万方数据