A chip-level ion source structure with a triode-type field emitter is designed for the micro mass spectrometer of spacecraft,which consists of a gas ionization by electron impact and an ion extraction section.The structure of the ion source is composed of five layers of electrodes.A chip-level ion source prototype was prepared using MEMS technology,and the electron flow,ion flow and stability were tested.The results show that the chip-level ion source can generate an electron current of over 0.357 mA,and the received ion current can reach 527 pA,meeting the functional requirements of the ion source for micro mass spectrometers in space exploration missions.
关键词
微机电系统/离子源/深空探测/空间质谱仪
Key words
MEMS/ion source/deep space exploration/mass spectrometer of spacecraft
维普
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