High-precision transmission control of electron beams is important to ensure reliable applications of electron guns in metal melting,evaporation coating,and electron beam welding.The transmission control technology of electron beams in the evaporation environment of metal materials was studied,and a 30 kV electron beam deflection model was established based on CST particle simulation analysis software.The influence of the structure and position parameters of the deflection device on the distribution of electron beam was analyzed,and the control parameters and structure of the electron beam deflection that meet the requirements were obtained through simulation design optimization.The test results show that the electron beam transmission trajectory under the optimized structure is controllable,and the established 30 kV electron beam deflection system meets the requirements.
关键词
电子束传输/CST仿真/偏转装置优化
Key words
electron beam transmission/CST simulation/optimization of the deflection device
维普
万方数据