Measurement and Analysis of Pumping Speed of G-M Refrigerator Cryopump Based on the Orifice Method
Pumping speed is an important index to measure the pumping performance of cryopump.The throughput method is generally used to measure the pumping speed of cryopump in China.In addition,the orifice method is also an important method for measuring the cryopump pumping speed.In this paper,detailed introduction of pumping speed test for different gases of ZD-200 caliber cryopump was conducted based on the orifice method specified in the current standards.The results show that the pumping speed of cryopump for N2 and Ar are 2 410 L/s and 1 884 L/s respectively,which are significantly better than the indicators of similar products at home and abroad.The pumping speed of cryopump for H2 is 2 577 L/s,which is at the same level as the technical indicators of domestic and foreign products.The test results obtained by the orifice method have high accuracy and credibility.
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