Design and Research on Vacuum System of Large Series Electron Beam Melting Furnace
A design method for the vacuum system of a large series electron beam melting furnace is proposed to address the difficulty in selecting and designing the exhaust system.Firstly,calculate the effective pumping speed based on the gas load of the vacuum furnace body,roughly select the main pump,and then verify the pumping speed of the main pump using the effective pumping speed and the flow conductivity of the pumping system.Secondly,select the front stage of the main pump and the pre-extraction of the vacuum furnace body,and calculate their pumping speed.Then calculate the rough extraction time and high vacuum extraction time to verify the rationality of the selection.Finally,verify the designed electron beam melting furnace system through experiments.The results show that the designed furnace vacuum system has a slightly higher crude and high vacuum extraction time than the calculation time,and the ultimate vacuum degree is better than the design requirements.The calculated results of this method are highly consistent with the experimental results and can meet the design requirements of vacuum systems similar to the large vacuum melting furnace.
electron beam melting furnacevacuum pumping systemvacuum pumping timevacuum selection
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