大抽速、高容积KDCP-16低温泵研制
Development of KDCP-16 Cryopump with Large Pumping Speed and High Capacity
卢政阳 1管承红 1杨晨 1陈杰 1李艳峰 1董文庆1
作者信息
- 1. 中船鹏力(南京)超低温技术有限公司,江苏 南京 211100
- 折叠
摘要
介绍了中船鹏力(南京)超低温技术有限公司自主研制的大抽速、高容积KDCP-16低温泵,对其抽速和热负荷进行了理论计算,并测试了其主要性能指标(抽速、降温时间、抽气容积、渡越容量).结果表明,KDCP-16 低温泵N2 抽速为 6 550 L/s,Ar抽速为 5 650 L/s,降温时间为 110 min,Ar抽气容积为7 550 std·L,渡越容量为6.7×104 Pa·L,各项性能指标均优于国外同尺寸低温泵.
Abstract
The large pumping speed and high capacity KDCP-16 cryopump independently developed by CSIC Pride Cryogenic Technology Co.,Ltd.is introduced.The pumping speed and thermal load of the cryopump are theoretically calculated.The test methods of the main performance indexes(pumping speed,cool down time,gas capacity,crossover value)of KDCP-16 cryopump are introduced.The results show that the N2 pumping speed of KDCP-16 cryopump is 6 550 L/s,the Ar pumping speed is 5 650 L/s,the cooling time is 110 minutes,the Ar gas capacity is 7 550 std·L,and the crossover value is 6.7×104 Pa·L.The performance index of KDCP-16 cryopump is better than that of foreign cryogenic pumps of the same size.
关键词
低温泵/抽速/降温时间/抽气容积/渡越容量Key words
cryopump/pumping speed/cool down time/gas capacity/crossover value引用本文复制引用
基金项目
国家重点研发计划(2023YFF0721300)
出版年
2024
NETL
NSTL
万方数据