首页|厚度对TiN薄膜力学性能的影响

厚度对TiN薄膜力学性能的影响

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采用电弧离子镀方法制备了不同厚度TiN薄膜,并对其硬度、结合力、残余应力、摩擦磨损特性等力学性能进行了系统性研究,以揭示硬质薄膜厚度对其力学性能的影响规律.结果表明,随着厚度增加,薄膜表面大颗粒增加,膜基界面剪切力增大,薄膜硬度逐渐增加,结合力逐渐下降,摩擦系数略有下降;而薄膜应力沿层深分布趋势基本一致,都呈钟罩形分布;磨损率随薄膜厚度变化不大,即薄膜越厚越耐磨.
Effect of TiN Films Thickness on MechanicalProperties of Stainless Steel
The surface of 316L stainless steel was modified with the TiN coatings deposited by arc ion plating. The effect of the coating conditions,including but not limited to the N2 pressure,substrate temperature,film thick-ness,deposition time and bias voltage,on the microstructures and mechanical properties was investigated with scan-ning electron microscopy,energy dispersive spectroscopy and conventional mechanical probes.The results show that the thickness of TiN coating has a major impact on the mechanical behavior of the surface and interface.To be spe-cific,as the thickness increased,the grain-size,surface hardness,interfacial shear-stress and wear-resistance in-creased,accompanied by decreases of the friction coefficient and interfacial adhesion.In addition,the average stress vertically changed in a slow increase-decrease manner.

Hard FilmsMechanical propertiesThickness of FilmTiNResidual Stress

赵升升、蒋春磊、周晟昊、余红雅、匡同春、曾德长

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华南理工大学材料科学与工程学院 广州 510640

深圳职业技术学院深圳现代设计与制造技术重点实验室 深圳 518055

广东正德材料表面科技有限公司华南理工大学中山材料表面工程与薄膜技术创新研发中心 中山 528437

硬质薄膜 力学性能 薄膜厚度 TiN 残余应力

国家自然科学基金深圳市科技计划项目中山市科技计划与创新团队项目

51401128JCYJ20140508155916426

2016

真空科学与技术学报
中国真空学会

真空科学与技术学报

CSCD北大核心EI
影响因子:0.761
ISSN:1672-7126
年,卷(期):2016.36(3)
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