WC-DLC wear-resistant coatings were prepared by DC magnetron sputtering,and the influence of C2H2 gas flow rate on surface morphology,microstructure,mechanical and tribological properties of WC-DLC coatings prepared with a flow rate of C2H2 at 10-50 mL/min was investigated.Results show that,with the increasing flow rate of C2H2,the content of carbon in the coatings increases,the constituent of the coating gradually changes from columnar grain to fine grain,and the coating becomes denser.The nano-hardness of the coating is closely related to the content of hybridized sp3 carbon atoms.As the content of sp3-C in the coating increases,the hardness and wear rate of the coatings increase first and then decrease.When the carbon atom exceeds a certain content,a large amount of amorphous carbon will appear,the surface of the coating will become amorphous,and the friction coefficient gradually decreases and becomes more stable.
关键词
WC-DLC涂层/C2H2流量/纳米硬度/结合力/摩擦磨损
Key words
WC-DLC coating/Rate of flow/Nano-hardness/Bonding strength/Tribological properties
万方数据