A test device is designed to measure the NEG properties by either the constant pressure or the constant volume method.The device has two test stations with symmetrical structures,which can pretest and test two samples at the same time.The device has a reasonable structure and high test efficiency.The test device can directly output performance parameters by software,such as sorption rate and sorption quantity.The test results show that the vacuum of the device is high,such as the vacuum of the sample chamber is better than 1×10-7 Pa,the leakage rate is less than 3 × 10-7 Pa·L/s,the test data of the device is high precision and reliable,such as the sorption rate measurement accuracy is 1 mL/s,the sorption quantity measurement accuracy is 1 Pa-mL.
关键词
双工位/定压法/定容法/吸气性能/小孔流导
Key words
Two test stations/Constant pressure method/Constant volume method/Sorption characteris-tics/Conductance
维普
万方数据