摘要
文章对新研制的便携式分压力质谱计校准装置的部分性能进行了测试.采用参考电离真空计测量了装置的极限真空度;对于流导值在10-2 m3/s的圆孔型抽气流导元件,通过精确测量其直径和厚度的尺寸,采用公式计算得到分子流条件下的流导值;对于孔径在微米量级的进气流导元件,采用定容衰减压力的方法通过实验测量确定其流导值;采用同一真空计分别测量抽气流导元件两端的气体压力获得返流比.测试研究结果表明:装置的极限真空度为4.8×10-7Pa,抽气流导元件对N2的流导值为1.37×10-2 m3/s,对N2的返流比为0.193,两个进气流导元件对N2的流导值分别为3.81×10-6 m3/s、4.50×10-8 m3/s,综合分析可得装置对N2的校准范围为(4×10-1～5×10-6)Pa.
Abstract
This paper tested part performance of the latest developed portable calibration apparatus of mass spectrometers for partial pressure.The ultimate vacuum of the device was measured using a reference ionization gauge;The diameter and the thickness of the gas-operated element which conductance is about 10-2 m3/s could be measured accurately and the conductance was calculated using formular under the molecular flow condition.The conductance of the gas-intaked conductance elements with micro-meter apertures was measured using constant volume experiments.The back-streaming ratio is obtained using the same vacuum gauge to measure the gas pressure at both sides of the gas-operated conductance elements.The experimental results proved that the ultimate vacuum of the device is 4.8×10-7 Pa.The conductance of the gas-exhausted element for N2 is 1.37× 10-2 m3/s.The conductance of two gas-intaked conductance elements for N2 are 3.81×10-6 m3/s and 4.50×10-8 m3/s respectively.The back-streaming ratio for N2 is 0.193.Based on analysis,the calibration range of the device for N2 is(4×10-2～5×10-6)Pa.
维普
万方数据