In this paper,a carbon nanotube electron source is applied to a highly stable ionization gauge,and a preliminary performance experimental study of the prototype is carried out.The results show that the sensitivity of the novel ionization gauge fluctuates in the range of 0.200 Pa-1～0.245 Pa-1 from 6.87× 1 0-6 Pa to 6.45× 10-5 Pa,with a maximum deviation of 20％from the simulated sensitivity of 0.250 Pa-1,and the sensitivity fluctuation is less than 5.96％,which proves that the structure is well-designed and is expected to be applied to high vacuum calibration and precise measurement.
关键词
碳纳米管电子源/电离真空计/灵敏度
Key words
Carbon nanotube electron source/Ionization gauge/Sensitivity
维普
万方数据