首页|Mg85Ni15减反层对玻璃衬底上VO2薄膜光电性能的影响

Mg85Ni15减反层对玻璃衬底上VO2薄膜光电性能的影响

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采用脉冲激光沉积技术,在非晶玻璃衬底上生长单斜晶相的二氧化钒(M-VO2)薄膜,并研究了Mg85Ni15 减反层对M-VO2 薄膜性能的影响.实验结果表明:在非晶玻璃衬底上制备的M-VO2 薄膜具有单一取向且纯度较高,并具有良好的光电热致转变性能.Mg85Ni15 作为减反层,在没有特别降低电学性能的基础上,提高了薄膜的可见光透过率和太阳能调节率.通过对减反层厚度的优化发现:在减反层厚度为 60 nm时,相变温度最低,且热滞宽度最窄为 6℃.此工作的开展有利于推进VO2 薄膜在智能窗方面的应用.
Influence of Mg85Ni15 Anti-Reflection Layers on Photoelectric Properties of the VO2 Thin Films on Glass Substrate
A monoclinic phase of vanadium dioxide(M-VO2)film was grown on an amorphous glass substrate by pulsed laser deposition technique,and the effect of the Mg85Ni15 anti-reflection layers on the M-VO2 film was investigated.The experimental results show that the M-VO2 film prepared on the amorphous glass substrate has a single orientation and high purity.As an anti-reflection layer,Mg85Ni15 improves the visible light transmittance and solar energy adjustment rate of the film.By optimizing the thickness of the anti-reflection layer,it is found that when the thickness of the anti-reflection layer is 60 nm,the phase transition temperature is the lowest and the thermal hysteresis width is the narrowest at 6℃.The development of this work is conducive to promoting the application of VO2 thin films in smart windows.

Pulsed laser depositionVO2 thin filmsMg85Ni15 anti-reflection layerPhotoelectric properties

王坤、王麒雯、刘初蕾、康朝阳

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河南地矿职业学院 郑州 451464

河南大学未来技术学院 郑州 450046

脉冲激光沉积 VO2薄膜 Mg85Ni15减反层 光电性能

国家自然科学基金项目

11405045

2024

真空科学与技术学报
中国真空学会

真空科学与技术学报

CSTPCD北大核心
影响因子:0.761
ISSN:1672-7126
年,卷(期):2024.44(7)
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