静电力平衡式MEMS电容薄膜真空计检测电路研究
Study on Detection Circuit of Electrostatic Servo MEMS Capacitance Diaphragm Vacuum Gauge
王绥辉 1徐恒通 1李刚 1韩晓东 1孙雯君 1成永军 1李得天1
作者信息
- 1. 兰州空间技术物理研究所 真空技术与物理重点实验室,兰州 730000
- 折叠
摘要
静电力平衡式MEMS电容薄膜真空计量程宽、稳定性高,具有广阔的应用前景.测量电路是保证静电力平衡式MEMS电容薄膜真空计性能的关键因素.采用交流激励式检测方法,设计了一种微小电容检测电路,并利用软件仿真和实验测试进行验证.结果表明,该电路能够快速检测微小电容并将其转换为直流电压信号,分辨率为 0.33 V/pF.此外,抗驱动电压干扰测试表明,该电路能够在 1～100 V范围的直流驱动电压下正常工作,电容测量的输出电压最大标准差为0.010249 V,并且具有优异的稳定性.
Abstract
The electrostatic servo MEMS capacitance diaphragm vacuum gauge has wide range and high stability,and has broad application prospect.The measurement circuit is the key factor to ensure the performance of the electrostatic servo MEMS capacitance diaphragm vacuum gauge.A micro capacitance detection circuit is designed by using AC excitation de-tection method,and verified by software simulation and experiment.The results show that the circuit can quickly detect small capacitors and convert them into DC voltage signals with a resolution of 0.33 V/pF.In addition,the anti-drive voltage inter-ference test shows that the circuit can work normally at DC drive voltages in the range of 1～100 V,and the maximum vari-ance of capacitance measurement is 0.010249 V,which has excellent stability.
关键词
静电力平衡式MEMS电容薄膜真空计/微小电容检测/交流激励式/抗驱动电压干扰Key words
electrostatic servo MEMS capacitance diaphragm gauge/micro-capacitance detection/AC excitation type/anti-drive voltage interference引用本文复制引用
基金项目
国家重点研发计划(2023YFF0717200)
出版年
2024
NETL
NSTL
维普
万方数据