Preparation and Properties of W-doped Diamond-like Carbon Films by Unbalanced Magnetron Sputtering
In order to study the effect of W doping on the properties of diamond-like carbon films,five groups of hydro-genated diamond-like carbon films(a-C:H:W)with different W atomic percentage(0%～14%)were prepared on YG6 ce-mented carbide substrate by unbalanced magnetron sputtering method by changing the power of WC target.The surface mor-phology of the film was analyzed by scanning electron microscopy.The microstructure of the films was analyzed by Raman spectroscopy.The nano-hardness,adhesion and tribological properties of the film were characterized by nanoindenter,scratch tester and tribometer.The results show that the surface of a-C:H:W film is mound particles,with the increase of WC target power,the particle size decreases first and then increases,the degree of graphitization of the film increases with the in-crease of the doping amount,the critical scratch force Lc2 value of the film with 4%W doping atom percentage reaches 78.28 N,the wear rate is 5.8×10-8 mm3/N·m,and the friction coefficient is 0.09.
magnetron sputteringDLC filmselement dopingsurface topographyadhesive force
NETL
NSTL
万方数据
维普
