光学压力计的标定及应用
Calibration and Application of Optical Manometer
聂中梁 1王新广 2王进 1杨远超 3胡常乐 1孙羽 4胡水明5
作者信息
- 1. 中国科学技术大学合肥微尺度物质科学国家研究中心,合肥 230026
- 2. 中国科学技术大学化学物理系,合肥 230026
- 3. 中国计量科学研究院,北京 100029
- 4. 深圳综合粒子设施研究院,广东 深圳 518107
- 5. 中国科学技术大学合肥微尺度物质科学国家研究中心,合肥 230026;中国科学技术大学化学物理系,合肥 230026
- 折叠
摘要
搭建了基于光学谐振腔的气体压力测量装置,即光学压力计.使用测量不确定度为0.0011％(k=1)的活塞压力计,对两套独立的光学压力计进行标定,并对光学压力计的测量不确定度进行了系统的分析与评定,最终得到其压力测量的合成标准不确定度.利用该光学压力计对一台标称测量不确定度为0.025％的商用电容薄膜真空计进行多次校准.结果表明,在校准后的1年时间内,该薄膜压力计电容薄膜真空计的测量不确定度可达0.003％,大幅度提高了该商用电容薄膜真空计的测量不确定度.该光学压力计具有较好的长期稳定性,可应用于校准各种商用压力计,提高实际测量不确定度.
Abstract
We developed an instrument for gas pressure calibration based on optical resonance cavities,the so-called op-tical pressure gauge.Two independent optical pressure gauges were calibrated by a piston pressure gauge with a stated uncer-tainty of 0.001 1％(A=1).The uncertainty budget of the optical pressure gauge was systematically analyzed,and the overall uncertainty of the system was obtained.The optical pressure gauge was used to calibrate a commercial capacitance di-aphragm gauge with a stated uncertainty of 0.025％several times during a period over one year.The results show that the un-certainty can reach 0.003％within one year after calibration.The results demonstrate the use of the optical gauge in calibrat-ing commercial gauges with high accuracy,and also indicate a good long-term stability of the optical pressure gauge.The in-strument therefore can be applied to calibrate various commercial pressure gauges to improve the uncertainty of actual mea-surement.
关键词
真空计量/压力计/Fabry-Perot腔/气体折射率Key words
vacuum measurement/pressure gauge/Fabry-Perot cavity/gas refractive index引用本文复制引用
基金项目
中国科学院先导科技专项(XDC07010000)
中央高校基本科研业务费专项(WK9990000105)
出版年
2024
NETL
NSTL
万方数据