首页|MEMS电容薄膜真空计微电容检测系统的设计

MEMS电容薄膜真空计微电容检测系统的设计

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为了满足空间环境探测对真空测量仪器准确度高、体积小、质量轻、功耗低的应用需求,基于微机电系统(MEMS)的小型化电容薄膜真空计应运而生.针对MEMS电容薄膜真空计微小电容测量需求,设计了一种基于CDC电容数字转换器的微电容检测系统,获得了fF级微电容检测分辨率.采用温度漂移误差自校准技术,解决了测量压力受温度扰动影响的问题.地面样机测试与验证表明,该检测系统具有宽量程、高分辨率和低功耗检测的优点,为MEMS电容薄膜真空计实现空间应用奠定了技术基础.
Design of Micro Capacitance Measurement System for MEMS Capacitance Diaphragm Gauges
In order to satisfy the application requirements of high accuracy,small size,light weight and low power con-sumption for vacuum measurement instruments in space detection tasks,miniature capacitance diaphragm gauge(CDG)based on MEMS technology comes into being.For the MEMS CDG developed by our team,a micro capacitance measure-ment system based on CDC capacitor digitizer was designed and fabricated,and it can distinguish capacitance variations of fF-level.The temperature drift error self-calibration technology was adopted to solve the temperature disturbance problem.The testing and verification results of the prototype show that it has the advantages of wide range,high resolution and low power consumption,providing foundation for the application of MEMS CDGs in space detection.

MEMScapacitance diaphragmvacuum gaugesmicro capacitanceelectronic measurement

高青松、郭朝帽、陶院、杨雷、马动涛、张虎忠

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兰州空间技术物理研究所 真空技术与物理重点实验室,兰州 730000

MEMS 电容薄膜 真空计 微弱电容 电子测量

国家自然科学基金重大科研仪器研制项目

61627805

2024

真空与低温
中国航天科技集团公司第五研究院510研究所

真空与低温

CSTPCD
影响因子:0.567
ISSN:1006-7086
年,卷(期):2024.30(6)