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关于超小尺寸器件的等效标准漏率判据的讨论

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对于内空腔容积小于 0.01 cm3 的超小尺寸密封器件,在器件贮存期内环境气氛对其内部水汽含量的影响尤为明显,在较短的储存期内水汽含量有可能超过 2%,并趋于饱和,无法满足 0.5%的规范要求.在进行氦气背压法检漏时,还存在器件候检阶段测量漏率快速下降的问题.讨论了超小尺寸器件密封试验的等效标准漏率判据不足问题,提出了相应的密封性评价方法.
Discussion on the Criteria of the Equivalent Standard Leak Rate of Super Small Size Device
For the hermetic packages with internal free volume less than 0.01 cm3,the environmental humidity impacts on the moisture content of this types of devices will be more serious,and the moisture content could be over 2%and tends to saturation in a short storage period.In the process of helium inside-out leak testing,the measured leak rate would drop quick-ly in the dwell time between release of pressure and leak detection.The issues of the loose criteria of the equivalent standard leak rate for this type of devices were discussed,and the measure of evaluation on their hermeticity performance was pro-posed.

super-small-size devicesequivalent standard leak rateminimum theoretical leak ratetime constant of leakageseverity

肖汉武、李阳

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中国电子科技集团公司第五十八研究所,江苏 无锡 214035

无锡中微高科电子有限公司,江苏 无锡 214035

超小尺寸器件 等效标准漏率 最小理论漏率 泄漏时间常数 严酷等级

国家重点研发计划项目

2021YFB3202703

2024

真空与低温
中国航天科技集团公司第五研究院510研究所

真空与低温

CSTPCD
影响因子:0.567
ISSN:1006-7086
年,卷(期):2024.30(6)