基于碳纳米管-金属肖特基接触的气体低压传感技术

Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts

黄春田 ¹叶妮妮 ¹邵和助 ¹方朝龙 ¹董长昆¹

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作者信息

1. 温州大学温州市微纳光电器件重点实验室,浙江温州 325035
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摘要

碳纳米管(CNT)具有独特的结构和优异的物理性能,在气体吸附的条件下,CNT-金属接触结构的电学性能会发生变化,这种变化可用于气体传感领域.采用Lift-off工艺和介电电泳沉积法(DEP)制备了基于CNT-金属肖特基结的CNT场效应管(CNT-FET)和CNT/Au电阻传感器,并在10-7～10-5 Pa的低压力环境下进行了氢气和氮气传感测试.CNT-FET和CNT/Au电阻传感器对氢气具有相似的传感效应,在测试压力区间内电流分别增长0.05 μA和0.14 μA.研制成果探索了低压气体传感的新途径.

Abstract

Carbon nanotube(CNT)has unique structure and excellent physical property.It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact.The CNT-FET and CNT/Au resistance sensors based on the CNT-metal Schottky junction were constructed by the lift-off and dielectrophoretic(DEP)processes.The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10-7～10-5 Pa.The currents of CNT-FET and CNT/Au resistance sensors increased 0.05 μA and 0.14 μA,respectively,which exhibit similar hydrogen sensing perfor-mance.The research results have explored a new approach of low pressure sensing.

关键词

碳纳米管/肖特基势垒/气体传感/功函数

Key words

carbon nanotube/Schottky barrier/gas sensing/work function

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基金项目

国家自然科学基金(62374118)

国家重点研发计划(2023YFF0723700)

出版年

2024

真空与低温

中国航天科技集团公司第五研究院510研究所

真空与低温

CSTPCD

影响因子：0.567

ISSN：1006-7086

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