Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts
Carbon nanotube(CNT)has unique structure and excellent physical property.It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact.The CNT-FET and CNT/Au resistance sensors based on the CNT-metal Schottky junction were constructed by the lift-off and dielectrophoretic(DEP)processes.The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10-7~10-5 Pa.The currents of CNT-FET and CNT/Au resistance sensors increased 0.05 μA and 0.14 μA,respectively,which exhibit similar hydrogen sensing perfor-mance.The research results have explored a new approach of low pressure sensing.
carbon nanotubeSchottky barriergas sensingwork function