首页|基于碳纳米管-金属肖特基接触的气体低压传感技术

基于碳纳米管-金属肖特基接触的气体低压传感技术

扫码查看
碳纳米管(CNT)具有独特的结构和优异的物理性能,在气体吸附的条件下,CNT-金属接触结构的电学性能会发生变化,这种变化可用于气体传感领域.采用Lift-off工艺和介电电泳沉积法(DEP)制备了基于CNT-金属肖特基结的CNT场效应管(CNT-FET)和CNT/Au电阻传感器,并在10-7~10-5 Pa的低压力环境下进行了氢气和氮气传感测试.CNT-FET和CNT/Au电阻传感器对氢气具有相似的传感效应,在测试压力区间内电流分别增长0.05 μA和0.14 μA.研制成果探索了低压气体传感的新途径.
Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts
Carbon nanotube(CNT)has unique structure and excellent physical property.It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact.The CNT-FET and CNT/Au resistance sensors based on the CNT-metal Schottky junction were constructed by the lift-off and dielectrophoretic(DEP)processes.The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10-7~10-5 Pa.The currents of CNT-FET and CNT/Au resistance sensors increased 0.05 μA and 0.14 μA,respectively,which exhibit similar hydrogen sensing perfor-mance.The research results have explored a new approach of low pressure sensing.

carbon nanotubeSchottky barriergas sensingwork function

黄春田、叶妮妮、邵和助、方朝龙、董长昆

展开 >

温州大学 温州市微纳光电器件重点实验室,浙江 温州 325035

碳纳米管 肖特基势垒 气体传感 功函数

国家自然科学基金国家重点研发计划

623741182023YFF0723700

2024

真空与低温
中国航天科技集团公司第五研究院510研究所

真空与低温

CSTPCD
影响因子:0.567
ISSN:1006-7086
年,卷(期):2024.30(6)