Evaluation and Analysis of Measurement Uncertainty in Scanning Electron Microscope Indication Error
The article introduces the principles and applications of scanning electron microscopys and analyzes the sources of uncertainty in the measurement of length indication errors of SEM,including measurement repeatability,measurement voltage,measurement distance,measurement multiple,image resolution,and standard grid template.Taking the measurement of a 1μm standard grid template as an example,the article evaluates the individual standard uncertainty components,calculates the combined standard uncertainty and expanded uncertainty,and finds the evaluation result to be 5.4nm,which is less than one-third of the measurement performance evaluation(MPE)requirement for length measurement errors in SEMs..The article provides reference and assistance for evaluating the measurement uncertainty of scanning electron microscope indication error.
Scanning electron microscopeUncertaintyMetrologyMeasuring voltage