照明工程学报2024,Vol.35Issue(5) :47-53.DOI:10.3969/j.issn.1004-440X.2024.05.007

管壁温度对氟化镁窗氘灯光稳定度的影响研究

Study on the Effect of Wall Temperature on the Light Stability of Deuterium Lamp with Magnesium Fluoride Window

王佳琦 张绍春 王加朋 杜继东 孙广尉 韩秋漪 张善端
照明工程学报2024,Vol.35Issue(5) :47-53.DOI:10.3969/j.issn.1004-440X.2024.05.007

管壁温度对氟化镁窗氘灯光稳定度的影响研究

Study on the Effect of Wall Temperature on the Light Stability of Deuterium Lamp with Magnesium Fluoride Window

王佳琦 1张绍春 1王加朋 2杜继东 2孙广尉 2韩秋漪 1张善端1
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作者信息

  • 1. 复旦大学电光源研究所,上海 200438
  • 2. 北京振兴计量测试研究所,北京 100074
  • 折叠

摘要

氟化镁窗氘灯能提供115~400 nm的真空紫外和紫外波段的辐射,具有辐亮度高、光谱宽、尺寸小等优势,在真空紫外标准光源、有害气体检测、半导体检测等领域有重要应用.管壁温度是影响国产氟化镁窗氘灯紫外光稳定度的重要因素.本文定量分析了工作温度对光稳定度的影响,实验证实氘灯光输出稳定度最优的工作温度范围为118 ℃~130℃.设计了一种内外双层的流体散热灯具,通过气冷和水冷两种散热方式均能实现氘灯在最佳管壁温度区间内工作,优化后氘灯的紫外辐照度稳定度<0.37%.

Abstract

Deuterium lamps with magnesium fluoride window can provide radiation in the vacuum ultraviolet(VUV)and ultraviolet(UV)range from 115 nm to 400 nm,offering advantages such as high radiance,broad spectrum and compact size.They have important applications in fields like VUV standard light sources,hazardous gas detection,and semiconductor inspection.Wall temperature is an important factor affecting the UV light stability of domestically produced MgF2-window deuterium lamps.This paper quantitatively analyzes the impact of operating temperature on light stability,confirming through experiments that the optimal operating temperature range for stable light output from deuterium lamps is 118 ℃ to 130 ℃.A dual-layer fluid-cooled luminaire has been designed,which utilizes both air cooling and water cooling methods to ensure the deuterium lamp operates within the optimal wall temperature range.After optimization,the UV irradiance stability of the deuterium lamp is<0.37% .

关键词

氟化镁窗氘灯/散热/灯具设计/紫外辐射/光稳定度

Key words

deuterium lamp with magnesium fluoride window/heat dissipation/luminaire design/ultraviolet radiation/light stability

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出版年

2024
照明工程学报
中国照明学会

照明工程学报

影响因子:0.745
ISSN:1004-440X
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