化学沉积Mn掺杂ZnO薄膜的结构和光学性能
Structural and optical properties of chemically deposited Mn-doped ZnO thin films
Emine GüNERI 1Johnson HENRY 2Fatma G?DE 3Nilgün Kalaycio?lu ?ZPOZAN4
作者信息
- 1. Faculty of Education,Erciyes University,Kayseri 38039,Turkey
- 2. Department of Physics,Manonmaniam Sundaranar University,Tirunelveli 627012,Tamil Nadu,India
- 3. Department of Physics,Arts and Science Faculty,Burdur Mehmet Akif Erosy University,Burrur 15030,Turkey
- 4. Department of Chemistry,Faculty of Science,Erciyes University,Kayseri 38039,Turkey
- 折叠
摘要
采用化学沉积法制备了纯ZnO和不同Mn掺杂浓度的Mn掺杂ZnO薄膜,并对所制备薄膜的结构、形态和光学性能进行了研究.XRD分析显示,所有薄膜都呈六角形结构,但Mn掺杂的ZnO薄膜存在峰移.随Mn掺杂浓度的升高,晶体尺寸增大.Mn掺杂ZnO薄膜表面分布不规则颗粒,并呈团聚状.Mn掺杂ZnO薄膜在可见光区表现出更高的透射率,但随着Mn掺杂浓度的升高,透射率逐渐降低.随Mn掺杂浓度的升高,薄膜的带隙减小.Mn掺杂ZnO薄膜在紫外区表现出更高的光导率和导电率.
Abstract
Pure ZnO and Mn-doped ZnO thin films were deposited by chemical bath deposition met for various Mn doping concentrations. The structural, morphological and optical properties of the prepared films were studied using various techniques. XRD analysis shows hexagonal structured ZnO for all films and peak shift is noticed for Mn-doped films. The crystallite size is found to be increased for Mn doping. The surface morphology of the Mn-doped film shows irregular shape particles that are agglomerated. The transmittance spectra show higher transmittance in the visible region and it decreased for Mn doping, which indicates an increase in optical absorption. The band gap of Mn-doped films is found to be decreasing with Mn doping. The Mn-doped films show higher optical and electrical conductivity in UV region.
关键词
ZnO/掺杂/薄膜/化学沉积/光导率Key words
ZnO/doping/thin film/chemical bath deposition/optical conductivity引用本文复制引用
出版年
2023
NETL
NSTL
维普
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