摘要
应某实验室要求,对实验室微纳加工平台进行洁净度检验检测及结果分析.采用现场检测方法,对实验室功能区及辅助用房进行洁净度、静压差、噪声、照度、温度、相对湿度、自净时间共七项参数进行现场检测.经对现场采集数据进行数据分析,该实验室洁净度ISO3.5级合格率达到100%,ISO5.5级、ISO6级、ISO7级合格率分别为80%、78%、86%,静压差检测合格率为73%,噪声检测的合格率为45%,照度检测合格率仅为13%,温度和相对湿度合格率为100%,107光刻2区自净时间为26min,206测试2区自净时间为32min.该实验室洁净卫生环境较差,应进行洁净室环境整改,加强洁净室的运行管理,对实验室的洁净度、静压差、照度、噪声等洁净指标进行严格把控,由此才能满足高精尖技术的研发进程,提高产品合格率.
Abstract
At the request of a laboratory,the cleanliness inspection and testing of the laboratory's micro-nano processing platform and the analysis of the results were carried out.The on-site testing method was used to conduct on-site testing of 7 parameters of cleanliness,static pressure difference,noise,illumination,temperature,relative humidity and self-cleaning time in functional areas and auxiliary rooms of the laboratory.After data analysis of the on-site collected data,the pass rate of ISO3.5 cleanliness of the laboratory reached 100%,the pass rate of ISO5.5,ISO6 and ISO7 was 80%,78%and 86%respectively,the pass rate of static pressure difference detection was 73%,the pass rate of noise detection was 45%,the pass rate of illuminance detection was only 13%,the pass rate of temperature and relative humidity was 100%,the self-cleaning time in zone 2 of 107 photolithography was 26min,and the self-cleaning time of zone 2 of 206 test was 32 minutes.The clean and hygienic environment of the laboratory is poor,and the clean room environment should be rectified,the operation and management of the clean room should be strengthened,and the cleanliness,static pressure difference,illumination,noise and other clean indicators of the laboratory should be strictly controlled,so as to meet the research and development process of high-precision technology and improve the product qualification rate.
NETL
NSTL
维普
万方数据