Analysis of the Cleanliness Test Results of a Micro-nano Processing Platform in a Laboratory
At the request of a laboratory,the cleanliness inspection and testing of the laboratory's micro-nano processing platform and the analysis of the results were carried out.The on-site testing method was used to conduct on-site testing of 7 parameters of cleanliness,static pressure difference,noise,illumination,temperature,relative humidity and self-cleaning time in functional areas and auxiliary rooms of the laboratory.After data analysis of the on-site collected data,the pass rate of ISO3.5 cleanliness of the laboratory reached 100%,the pass rate of ISO5.5,ISO6 and ISO7 was 80%,78%and 86%respectively,the pass rate of static pressure difference detection was 73%,the pass rate of noise detection was 45%,the pass rate of illuminance detection was only 13%,the pass rate of temperature and relative humidity was 100%,the self-cleaning time in zone 2 of 107 photolithography was 26min,and the self-cleaning time of zone 2 of 206 test was 32 minutes.The clean and hygienic environment of the laboratory is poor,and the clean room environment should be rectified,the operation and management of the clean room should be strengthened,and the cleanliness,static pressure difference,illumination,noise and other clean indicators of the laboratory should be strictly controlled,so as to meet the research and development process of high-precision technology and improve the product qualification rate.
NETL
NSTL
万方数据
维普
