The transparent conducting films(TCFs)of titanium-gallium-zinc oxide(TiGaZnO)were fabricated by magnetron-sputtering technique.The dependence of dielectric,opto-electronic and structural properties of the TiGaZnO TCFs on substrate temperature was investigated.The results indicate that all the thin films have a wurtzite hexagonal crystal structure and(002)-preferred orientation.The substrate temperature has a significant impact on the film properties of the TiGaZnO TCFs.The sample fabricated at 610 K possesses the optimal opto-electronic performance and crystalline quality,with the highest quality factor,maximum average visible transmittance,lowest resistivity and largest average grain size of 1.23×104 Ω-1·cm-1,86.85%,5.76×10-4 Ω·cm and 83.42 nm,respectively.Moreover,the optical constants of the TiGaZnO TCFs were determined by the optical spectrum fitting method(OSFM).The influences of substrate temperature on the optical constants and dielectric properties were studied.The results demonstrate that the refractive index,dielectric constant and dissipation factor are dependent on the substrate temperature for the TiGaZnO TCFs.
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