Microfine direct-write mask electrolytic processing of amorphous alloy planar microcoils
Aiming at the current mask electrolytic processing process curing,process complexity and other problems,a patterned mask electrolytic processing method based on microfine direct-write polymer materials is proposed.The application of the direct-write mask process to the microfine electrolytic machining planar coil process is investigated.The influence law of direct-write processing parameters on the mask is obtained using the one-factor method.The laws of process parameters such as processing voltage,cathode vibration frequency and duty cycle on forming accuracy were obtained using orthogonal experiments.A prediction model for the dimensions of the processed microstructures was established,and a planar microcoil structure with a width of 300 μm was processed on a thin alloy sheet with a thickness of 30 μm using the optimized process parameters,and a response with an impedance change rate of 3.46%was obtained by a network analyzer for the detection of the current sensing effect.The feasibility of direct-write mask applied to microfine mask electrolytic processing is demonstrated.
万方数据
维普
