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Metrological performance analysis of optical coherent tomography

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A spectral-domain optical coherence tomography (SD-OCT) system with 1555 nm center wavelength is tested for stability and accuracy from the micron level to the sub-micron level. The energy centrobaric correction method is used to extract the sub-axial-resolution information as the optical path difference, i.e., the topographic height. We compared the used algorithm with the widely applied phase slope method. The stability of a point scanning OCT system in Michelson style is experimentally compared with that of a system in Fizeau style. Several simple and complicated samples are measured and compared. Finally, we compare the topographic performance of the OCT system with a commercial confocal microscope and white-light interferometer (WLI).

Optical coherence tomographyTopographyAccuracyLateral resolutionScanning stepDEPTH

Yan, Ganwei、Yang, Kecheng、Li, Wei、Li, Zhibiao、Yin, Xiaojun、Xia, Min

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Huazhong Univ Sci & Technol

Wuhan Brivisus Technol Ltd

2022

Measurement

Measurement

SCI
ISSN:0263-2241
年,卷(期):2022.189
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