首页|Characteristics of Synthesized Diamond Films by Using CACVD Techniques at High Temperatures
Characteristics of Synthesized Diamond Films by Using CACVD Techniques at High Temperatures
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Trans Tech Publications Ltd
This paper presents synthesized diamond films by using combustion activated chemical vapor deposition (CACVD) techniques. The characteristics of diamond films have been studied at wide ranges of temperature (30-400℃). The resistance of diamond films has been determined for hydrogen termination times of 5, 10, 15, and 20 minutes, and at the operation temperatures of 500, 600, and 700℃. The investigation found that, at 30℃ a synthesized diamond film has a high resistance (10~(10) Ω), whereas at high temperatures (100-400℃) the resistance has decreased from 4.04 MΩ to 2.42 MΩ. The result obtained from the hydrogen termination showed that the resistance has decreased by 10~5-10~6 Ω (at 30℃). Summarily, it can be stated that the higher the hydrogen termination times and operation temperatures, the lower the resistance of diamond films.
diamond filmCACVDhydrogen terminationhigh temperature
Y. Wongprasert、S. B. Pongsai
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Department of Electronics, Faculty of Engineering, King Mongkut's Institute of Technology Ladkrabang, Thailand
Department of Chemistry, Faculty of Science, Burapha University, Thailand
NETL
NSTL
Trans Tech Publications Ltd
