首页|Fabrication of micro structures by ultra short voltage pulse electrochemical machining

Fabrication of micro structures by ultra short voltage pulse electrochemical machining

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The purpose of this paper is to study the application of electrochemical machining (ECM) technology for the fabrication of micro structures. The stray current corrosion, i.e. machining localization is a critical obstacle to micro fabrication for ECM. To machine micro structures by electrochemical machining ultra short voltage pulse is used. The effects of electrochemical machining parameters such as voltage, pulse duration, pulse frequency, and electrolyte composition on the machining accuracy were studied. In experiments, a micro hole was machined on stainless steel with cylindrical and square electrodes to investigate these effects.

electrochemical micro machiningmicro structureultra short voltage pulsessquare electrode

Chen Hui、Wang Zhen-long、Peng Zi-long、Zhao Wan-sheng

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Key Laboratory of Micro-system and Micro-structure Manufacturing (Harbin Institute of Technology), Ministry of Education, China 150001 School of Mechatronics Engineering, Harbin Institute of Technology, China 150001

Shanghai Jiao Tong University, China 200240

2010

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.419/420