首页|Measurement of d_(15) Shear-Mode Piezoelectric Response in PZT Thin Film
Measurement of d_(15) Shear-Mode Piezoelectric Response in PZT Thin Film
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NETL
NSTL
Trans Tech Publications Ltd
Piezoelectric films using d_(15) shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d_(15) shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 Jim-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d_(15) piezoelectric constant of the film was 590 pm/V. And, the d_(31) value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.
NETL
NSTL
Trans Tech Publications Ltd
