Durability Improvement of Optical H_2 Gas Sensor Using Pd Thin Film on Sputter-Etched Glass Substrate

扫码查看

原文链接

NETL
NSTL
Trans Tech Publications Ltd

外文摘要：A glass substrate was sputter-etched by R. F. magnetron sputtering at the powers of 100 or 200 W for 60 min in Ar gas. Pd thin film as a sensing agent of hydrogen (H_2) was deposited on the glass substrate. The durability of the sensor was evaluated during hydrogen absorption-desorption cycles. The Pd thin film on the glass substrate without sputter etching peeled off after dozens of the cycles. However, the Pd thin film on sputter-etched glass substrate didn't peel off. The contact angle of water on the glass substrate with sputter etching was smaller than that without sputter etching, suggesting that the surface energy of the substrate was increased by employing the sputter etching process. The improvement of durability for the optical hydrogen sensor using sputter etched substrate was related to the increase of surface energy induced by the sputter etching.

外文关键词：

hydrogen sensorsputter etchingoptical sensingPd thin filmglass substratecontact angle

作者：

Yuji Yakushiji、Yuichiro Kuroki、Tomoichiro Okamoto、Masasuke Takata

展开 >

作者单位：

Department of Electrical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

出版年：

2010

DOI：

10.4028/www.scientific.net/KEM.421-422.307

Key engineering materials

ISSN：1013-9826

年,卷(期)：2010.421/422

参考文献量8