首页|Fabrication of ZnO thin film transistors based on the substrate of glass

Fabrication of ZnO thin film transistors based on the substrate of glass

扫码查看
原文链接
  • NETL
  • NSTL
  • Trans Tech Publications Ltd
In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the I_(on/off) ratio is ～10~4.

fabricationphotolithographyZnOthin film transistors

X. Yang、C. Wang、C. Zhao、W. Tang、X. Gao、J. Yang、B. Liu、X. Qi、G. Du、J. Cao

展开 >

Jilin Institute of Architecture and Civil Engineering, Hongqi Street 1129#, Changchun, Jilin, China Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Dongnanhu Street 16#, Changchun, Jilin, China

Jilin Institute of Architecture and Civil Engineering, Hongqi Street 1129#, Changchun, Jilin, China

Northwestern University, USA

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Dongnanhu Street 16#, Changchun, Jilin, China

Dalian University of Technology, China

展开 >

2010

10.4028/www.scientific.net/KEM.428-429.501

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.428/429
  • 14