首页|Research on quantum state in fabricating poly-Si films
Research on quantum state in fabricating poly-Si films
扫码查看
点击上方二维码区域，可以放大扫码查看
原文链接
NETL
NSTL
Trans Tech Publications Ltd
Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.
PECVDa-Si: H filmpulsed rapid thermal annealingquantum states
Ruimin Jin、Lan-li Chen、Penghui Luo、Xinfeng Guo、Jingxiao Lu
展开 >
Department of Electronics, Nanyang Institute of Technology, Henan 473004, China Key Laboratory of Material Physics of the Ministry of Education of China, Zhengzhou University, Henan 450052, China
Department of Electronics, Nanyang Institute of Technology, Henan 473004, China
Key Laboratory of Material Physics of the Ministry of Education of China, Zhengzhou University, Henan 450052, China
NETL
NSTL
Trans Tech Publications Ltd
