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FEM Simulation on the Temperature Distribution of Ice Fixed Abrasives Polishing
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NETL
NSTL
Trans Tech Publications Ltd
The key question in the ice fixed abrasives (IFA) polishing is how to keep suitable ambient temperature in production process in order to avoid premature failure of the IFA. Based on above, the three dimensions finite element analysis (FEA) model of IFA polishing temperature field is built up at first. Then, the model reliability is demonstrated by experiments. Effects of ambient temperature and polishing time on temperature distribution and melting rate of the IFA pad are researched. The results show that the ambient temperature should be kept at about 10℃ in order to control the melting rate of the IFA pad effectively and keep longer polishing time. All the results provide the basis for choosing suitable ambient temperature in polishing.
ice fixed abrasivespolishingsingle silicon wafertemperature distributionfinite element method
Yuli Sun、Dunwen Zuo、Wenzhuang Lu、Yufei Zhao、Jing Kang、Min Wang
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College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China, 210016
NETL
NSTL
Trans Tech Publications Ltd
