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Experimental and Simulation Study on Diamond Convex Surface Film

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  • NETL
  • NSTL
  • Trans Tech Publications Ltd
Diamond convex surface films were synthesized on molybdenum substrate using DC plasma Jet CVD (DCPJCVD), and their microstructure and topography were characterized by those techniques such as X ray diffraction, Raman spectroscopy respectively. It showed that, when the substrate was pre-treated by polishing using successive micron diamond powder (about 30～3μm), diamond film was a polycrystalline texture and (111) faces were dominant. Raman spectrum shows that high quality diamond convex surface film was prepared successfully. Meantime, We used Finite element methods (FEM) to simulate the velocity, pressure and temperature fields of reaction chamber respectively, and it indicated that the distribution of the velocity, pressure fields were fluctuant, which had negative influence on diamond film, but the temperature fields is uniform, and it is an important factor to prepare high quality diamond convex surface film.

diamond convex surface filmchemical vapor depositionDC plasmaFEM simulation

Duosheng Li、Dunwen Zuo、Jianyun Zhang、Wenzhuang Lu、Feng Xu、Aihua Zou、Xia Cui

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College of Material Science and Engineering, Nanchang Hangkong University, Nanchang 330063, China

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China, 210016

2010

10.4028/www.scientific.net/KEM.431-432.351

Key engineering materials

Key engineering materials

ISSN：1013-9826
年,卷(期)：2010.431/432
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