Effect of the Internal Stress of Polished Thick Diamond Film on the Infrared Transmittance at Different Temperature

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NETL
NSTL
Trans Tech Publications Ltd

外文摘要：The optical-grade diamond film was prepared by DC plasma jet CVD method, and a double-sided polishing was made by EDM and mechanical polishing technology. The investigations of the internal stress at different temperature on the infrared transmission were tested in detail. SEM and AFM were used to study the polished surface morphology, surface roughness was 0.12nm and 0.25nm. XRD and Raman were characterized on the diamond films, the results showed a higher intrinsic quality. The internal stress distribution and infrared transmittance were investigated at 25℃ and 100℃ temperature respectively. The infrared transmission mechanism of diamond film was also discussed. The main reason of decreasing of infrared transmittance was the increasing grain collisions, which caused more scattering and absorption of incident light with temperature increasing.

外文关键词：

optical-grade CVD diamond filminternal stressinfrared transmission

作者：

Rongfa Chen、Zhaoxia Shen、Iianggang Dai、Xianliang Zhang、Rui Zhu、Dunwen Zuo

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作者单位：

Department of Mechanical Engineering, Yangzhou University, Yangzhou, China, 25009

Department of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China, 210016

出版年：

2010

DOI：

10.4028/www.scientific.net/KEM.431-432.401

Key engineering materials

ISSN：1013-9826

年,卷(期)：2010.431/432

参考文献量10