首页|Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes
Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes
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Trans Tech Publications Ltd
In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1～2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4μm), the elastic constant and the natural frequency of the NCD coated probes were increased by 96%～107% and 28%～30% respectively, compared with the silicon probes.
NCDsimulationAFM probeselastic constantnatural frequency
Yan Jiang、Xiangfeng Li、Dunwen Zuo、Jiajing Yuan
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College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics & Astronautics, Nanjing, 210016
NETL
NSTL
Trans Tech Publications Ltd
